| 摘要 |
The present invention relates to a holder supporting a substrate, and provided is a holder which comprises: a base including a first surface arranged to receive a substrate and a second surface opposite to the first surface; a first supporting unit provided on the second surface, arranged to surround a through hole formed on the base, and contacted with the table; a second supporting unit provided on the second surface, arranged to surround the first supporting unit, and contacted with the table; and multiple first pins provided on the second surface between the second supporting unit and the outer edge of the base, and contacted with the table. |
