| 摘要 |
The present invention relates to a deposition source apparatus with heater blocks, and more specifically, to a deposition source apparatus for a linear deposition system, comprising a main body where a deposition material is accommodated inside; a nozzle combination part formed long in the vertical direction along the longitudinal direction of the main body toward the upper main body; and spray nozzles formed and arranged to be protruded toward an upper part of the nozzle combination part; and a heating part for the main body, the nozzle combination part and the spray nozzles. The deposition source apparatus with heater blocks is assembled in a way where the heating parts for the nozzle combination part are formed respectively in a block shape on both sides of the nozzle combination part as ceramic heaters, and heating parts to heat the spray nozzles are formed as block-shaped ceramic heaters formed on both sides of the formed and arranged spray nozzles. Accordingly, provided are the advantages of simple manufacturing: having no problem of short circuit due to thermal deformation, preventing the deterioration of properties of an element due to outgassing, and easy handling and assembling due to minimal deformation. |
