发明名称 |
METHOD OF PRODUCING THERMOELECTRIC GAS-SENSITIVE MATERIAL |
摘要 |
FIELD: chemistry.SUBSTANCE: method includes forming a film with thickness of not more than 200 nm from semiconductor nanoparticles of SnOwith size of not more than 50 nm. The film of SnOnanoparticles is then annealed at temperature of 330±20 K or 500±20 K for at least 15 min in an oxygen-containing atmosphere, followed by cooling to room temperature at a rate of at least 10 K/s.EFFECT: broader functional capabilities of the material.2 cl, 4 dwg |
申请公布号 |
RU2530442(C1) |
申请公布日期 |
2014.10.10 |
申请号 |
RU20130123613 |
申请日期 |
2013.05.23 |
申请人 |
FEDERAL'NOE GOSUDARSTVENNOE BJUDZHETNOE UCHREZHDENIE "NATSIONAL'NYJ ISSLEDOVATEL'SKIJ TSENTR "KURCHATOVSKIJ INSTITUT" |
发明人 |
VARFOLOMEEV ANDREJ EVGEN'EVICH |
分类号 |
H01L35/34;B82B3/00 |
主分类号 |
H01L35/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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