TEMPLATE FOR NANO IMPRINT, PATTERN FORMING METHOD USING TEMPLATE FOR NANO IMPRINT, AND METHOD OF MANUFACTURING TEMPLATE FOR NANO IMPRINT

摘要

PROBLEM TO BE SOLVED: To provide a template having a loop cutting structure in which loop cut occurring in a side wall transfer process is stably performed, and also to provide a pattern forming method utilizing the template and a method of manufacturing the template.SOLUTION: A template for nano imprint includes an uneven shaped transfer pattern on the substrate main surface. In an uneven shape, a first side wall has an inclined shape and a second side wall has a vertical shape.