THIN FILM EVALUATION STRUCTURE AND THIN FILM EVALUATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a thin film evaluation structure and a thin film evaluation meted of a thin film capable of measuring a composition of a depth direction and a density distribution.SOLUTION: A thin film evaluation structure 1 is formed by including a chemical element which is different from this thin film 3 among the thin films 3 of an evaluation object and by sandwiching an ultra-thin film 4 that becomes an index. Using the ultra-thin film 4 thus formed as an index, a composition and a density in the depth direction of the thin film 3 of the evaluation object are obtained.