INERTIAL ANGULAR SENSOR OF BALANCED MEMS TYPE AND METHOD FOR BALANCING SUCH A SENSOR

摘要

An inertial angular sensor of MEMS type has a support of at least two masses which are mounted movably with respect to the support, at least one electrostatic actuator and at least one electrostatic detector. The masses are suspended in a frame itself connected by suspension means to the support. The actuator and the detector are designed to respectively produce and detect a vibration of the masses, and a method for balancing such a sensor provided with at least one load detector mounted between the frame and the support and with at least one electrostatic spring placed between the frame and one of the masses and slaved so as to ensure dynamic balancing of the sensor as a function of a measurement signal of the load sensor.

主权项

1. A vibrating inertial angular sensor of MEMS type comprising a support of at least two masses which are mounted movably with respect to the support, and at least one electrostatic actuator and at least one electrostatic detector which are designed to respectively produce and detect a vibration of the masses, wherein the masses are suspended in a frame itself connected by suspension means to the support.