发明名称 Method and Arrangement for Manufacturing a Sample for Microstructural Materials Diagnostics and Corresponding Sample
摘要 Method for manufacturing a sample for microstructural materials diagnostics, especially for transmission electron microscopy examinations, for scanning electron microscopy examinations for transmission electron-backscatter diffraction, for Rutheford backscatter diffraction, for elastic recoil detection analysis, for X-ray absorption spectroscopy or for X-ray diffraction, comprising detaching a basic structure from a preferably flat substrate by irradiating the substrate with a high energy beam, preferably with a laser beam, wherein the basic structure comprises a supported structure being supported by a supporting structure, preferably a cantilever beam which is supported at least at one of its both ends, preferably at both of its ends, by the supporting structure, the supporting structure being configured to be held by a jig, preferably to be clamped in the jig, and thinning the supported structure at least in sections by cutting, preferably by grazing, its surface, preferably at least at one of its lateral faces and/or of its front faces, preferably two opposing ones of its lateral faces, with the high energy beam.
申请公布号 US2014299785(A1) 申请公布日期 2014.10.09
申请号 US201414243354 申请日期 2014.04.02
申请人 Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V. 发明人 Krause Michael;Hoeche Thomas
分类号 B23K26/38;G01N1/00 主分类号 B23K26/38
代理机构 代理人
主权项 1. A method for manufacturing a sample for microstructural materials diagnostics comprising detaching a basic structure from a substrate by irradiating the substrate with a laser beam as an high-energy beam so that the detached basic structure comprises a supported structure and a supporting structure, wherein the supported structure is supported by the supporting structure and wherein the supporting structure is configured to be held by a jig, and thinning the supported structure at least in sections by cutting its surface with a/the laser beam.
地址 Munich DE