| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a vibrating element which is easily manufactured at a low cost and which is capable of showing a desired vibration characteristic.SOLUTION: A method of manufacturing a vibrating element comprises: a step to form a thin part 204 thinner than a plurality of piezoelectric substrates 20 by forming a plurality of recessed parts 203 on at least one major surface of the piezoelectric substrate 20 by etching; a step to adjust the thicknesses of the plurality of thin parts 204 so as to be the same as a predetermined thickness by plasma treatment; and a dividing step to divide each thin part 204 so that a thick part 22 whose thickness is thicker than the thin part 204 is positioned along at least one part of the outer edge of the thin part 204. |
