| 发明名称 |
DEPOSITION APPARATUS, METHOD OF FORMING THIN FILM USING THE SAME, AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS |
| 摘要 |
A deposition apparatus configured to perform a deposition process on a substrate, the deposition apparatus including a chamber having an exhaust opening in a surface, a deposition source in the chamber configured to eject one or more deposition materials toward the substrate, a cooling plate corresponding to an inner surface of the chamber, at which the exhaust opening is formed, a refrigerator contacting the cooling plate, and a pump coupled to the exhaust opening. |
| 申请公布号 |
US2014302624(A1) |
申请公布日期 |
2014.10.09 |
| 申请号 |
US201314012916 |
申请日期 |
2013.08.28 |
| 申请人 |
Samsung Display Co., ltd. |
发明人 |
Kim Sun-Ho;Huh Myung-Soo;Yi Jeong-Ho;Jo Cheol-Rae;Joo Hyun-Woo;Lee Yong-Suk |
| 分类号 |
H01L21/56;H01L51/00 |
主分类号 |
H01L21/56 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A deposition apparatus configured to perform a deposition process on a substrate, the deposition apparatus comprising:
a chamber having an exhaust opening in a surface; a deposition source in the chamber configured to eject one or more deposition materials toward the substrate; a cooling plate corresponding to an inner surface of the chamber, at which the exhaust opening is formed; a refrigerator contacting the cooling plate; and a pump coupled to the exhaust opening. |
| 地址 |
Yongin-City KR |
