TEMPLATE FOR NANO IMPRINT AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a template for nano imprint capable of easily discriminating an alignment mark formed in the same step as the transfer pattern while using a side wall process for formation of the transfer pattern, and also to provide a method of manufacturing the same.SOLUTION: A discrimination pattern having a configuration in which a plurality of convex type structures are arrayed is formed in association with an alignment mark using a side wall process having the same step as formation of the transfer pattern.