发明名称 COMPLEX OXIDE SINTERED BODY AND OXIDE TRANSPARENT CONDUCTIVE FILM
摘要 PROBLEM TO BE SOLVED: To provide a complex oxide sintered body which can provide an oxide transparent conductive film which shows a low light absorption property over a wide wavelength range and has a low resistance, and an oxide transparent conductive film.SOLUTION: In a complex oxide sintered body of which constituent elements are indium, zirconium, hafnium, and oxygen, an atomic ratio of elements constituting the sintered body is Zr/(In+Zr+Hf)=0.05-4.5at%Hf/(In+Zr+Hf)=0.0002-0.15at%, where content of indium, zirconium, and hafnium are In, Zr, and Hf, respectively.
申请公布号 JP2014194066(A) 申请公布日期 2014.10.09
申请号 JP20130164519 申请日期 2013.08.07
申请人 TOSOH CORP 发明人 KURAMOCHI TOSHIHITO;TAMANO KIMIAKI;AKIIKE RYO;IIGUSA HITOSHI
分类号 C23C14/34;C04B35/00 主分类号 C23C14/34
代理机构 代理人
主权项
地址