发明名称 CHALCOGENIDE SWITCHING DEVICE USING GERMANIUM AND SELENIUM AND MANUFACTURING METHOD THEREOF
摘要 Disclosed is a method for manufacturing a chalcogenide switching device includes forming a first electrode on a SOI substrate, forming a chalcogenide material composed of Gex and Se1-x formed on the first electrode, and forming a second electrode on the chalcogenide material, wherein the value x is greater than 0 and smaller than 1. A chalcogenide switching device manufactured by this method is also disclosed.
申请公布号 US2014299833(A1) 申请公布日期 2014.10.09
申请号 US201414242146 申请日期 2014.04.01
申请人 KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 CHEONG Byung-ki;KIM Sudong;LEE Suyoun;SHIN Sang-Yeol;AHN Hyung-Woo
分类号 H01L45/00 主分类号 H01L45/00
代理机构 代理人
主权项 1. A chalcogenide switching device, comprising: a first electrode formed on a silicon-on-insulator (SOI) substrate; a chalcogenide material composed of Gex and Se1-x formed on the first electrode; and a second electrode formed on the chalcogenide material, wherein the value x is greater than 0 and smaller than 1.
地址 Seoul KR