REAL TIME DIAGNOSTICS FOR FLOW CONTROLLER SYSTEMS AND METHODS

摘要

A device that includes a flow controller system that comprises one or more sensors, a flow measurement sensor that comprises one or more sensors. The flow measurement sensor is configured to generate a signal based on determine the difference between the flow as measured by the flow controller system and the flow measurement system in real time.

主权项

1. A system, comprising:
a flow device comprising:
a flow path connected to one or more sensors configured to generate one or more signals based on a flow of material past the one or more sensors;a control valve configured to change the flow of the material based on the signals from the one or more sensors; anda controller configured to receive a flow rate and the controller configured to control the control valve to output the material at the flow rate and the mass flow controller configured to output an actual flow rate and an indicated flow rate based on the signals from the one or more sensors.