TRANSFER DEVICE OF PLATE-LIKE OBJECT

摘要

PROBLEM TO BE SOLVED: To provide a transfer device of a plate-like object which suctions and holds the plate-like object in a non-contact manner regardless of the state of the plate-like object transferred by the transfer device because support means rotatably supports a non-contact type suction holder.SOLUTION: A transfer device of a plate-like object comprises: suction holding means 2 which suctions and holds the plate-like object W; and moving means which moves the suction holding means 2 from a first predetermined position to a second predetermined position. The suction holding means 2 includes: a base part 21 connected with the moving means; a non-contact type suction holder 22 which jets air to generate a negative pressure and thereby suctions the plate-like object W in a non-contact manner; and support means 23 which rotatably supports the non-contact type suction holder 22 on the base part 21.