| 摘要 |
<p>Provided are transfer equipment and a transfer method, capable of accurately detecting the possibility that a fork contacts a base substance to be transferred. Transfer equipment (1) of one embodiment uses forks to support base substances (for example, wafers) and transfers the base substances. The transfer equipment (1) comprises: acceleration detection means (20a to 20b) attached to locations directly or indirectly connected to the forks (for example, predetermined locations of fork holders or predetermined locations of a transfer machine) and detecting the accelerations of the forks; and a determination means (30) for, when an acceleration detected while the forks are operating exceed an upper limit value, determining that there is the possibility that a fork and a base substance contact each other. The transfer equipment further comprises a filter means (30) for passing a frequency component having a predetermined frequency band among the frequency components of the detected acceleration, wherein, when the acceleration obtained after the frequency component having the predetermined frequency band has been passed exceeds an upper limit value, the determination means may determine that there is the possibility that a fork and a base substance contact each other.</p> |
