| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet detection part of UV tubes mountable in parallel hardly causing the warping of electrodes.SOLUTION: With flat Si foundations taken as an upper lid 31 and a lower lid 41, an anode electrode 32 of the upper lid 31 and a cathode electrode 42 of the lower lid 41 are provided in a direction to face with each other. The upper lid 31 and the lower lid 41 are bonded and integrated with a direct bonding technique so as to be used as an ultraviolet detection part of a flame sensor. Since the anode electrode 32 is kept to be parallel to the cathode electrode 41 by polishing the anode electrode 32 and the cathode electrode 42 to be parallel with each other, a uniform electric field can be achieved between the electrodes. A UV ray's detection part having such a configuration is provided for the flame detection sensor, and as a result, when the UV rays contained in the flame are made incident, an electric discharge is normally generated between the electrodes so that abnormal discharge is hardly to occur. |
