发明名称 |
METHOD FOR MANUFACTURING OPTICAL ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical element, which can suppress damage to the optical element during bonding of the optical element without using an adhesive and improve a function and strength of the optical element, when the optical element is bonded.SOLUTION: A method for manufacturing an optical element comprises the steps of: forming a frame portion on a substrate and forming a structural body in a space portion surrounded by the frame portion to form a first optical member; disposing a second optical member on the first optical member under reduced pressure environment and bringing the frame portion and the second optical member into contact with each other to form the optical element in which the space portion is sealed in a pressure-reduced state; and exposing the optical element to the atmosphere to bring the structural body and the second optical member into contact with each other by differential pressure between the atmosphere and the space portion sealed in the pressure-reduced state. |
申请公布号 |
JP2014194553(A) |
申请公布日期 |
2014.10.09 |
申请号 |
JP20140093084 |
申请日期 |
2014.04.28 |
申请人 |
CANON INC |
发明人 |
IWAKATA MASAHIDE;TERADA JUNJI;ARAI KAZUHIRO |
分类号 |
G02B5/30;C03C27/06;G02B5/20;G02B27/28 |
主分类号 |
G02B5/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|