| 发明名称 |
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE |
| 摘要 |
The present invention provides a drawing apparatus which performs drawing on a substrate with a charged particle beam, including a transmission unit including a plurality of channels and configured to transmit drawing data via the plurality of channels, a plurality of storages respectively corresponding to the plurality of channels, and configured to respectively store the drawing data transmitted via the plurality of channels, and a controller (21;14) configured to control at least either one of transmission start time and a transmission rate of the drawing data from the transmission unit with respect to each of the plurality of storages. |
| 申请公布号 |
US2014302443(A1) |
申请公布日期 |
2014.10.09 |
| 申请号 |
US201414219121 |
申请日期 |
2014.03.19 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
OHISHI Shinji |
| 分类号 |
H01J37/302 |
主分类号 |
H01J37/302 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A drawing apparatus which performs drawing on a substrate with a charged particle beam, comprising:
a transmission unit including a plurality of channels and configured to transmit drawing data via the plurality of channels; a plurality of storages respectively corresponding to the plurality of channels, and configured to respectively store the drawing data transmitted via the plurality of channels; and a controller (21;14) configured to control at least either one of transmission start time and a transmission rate of the drawing data from the transmission unit with respect to each of the plurality of storages. |
| 地址 |
Tokyo JP |
