发明名称 |
PIEZOELECTRIC ELEMENT MODULE, ULTRASONIC TRANSDUCER, ULTRASONIC DEVICE, LIQUID JET HEAD, LIQUID JET APPARATUS, AND MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT MODULE |
摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element module which improves the sensitivity of a transmission section and a reception section, and to provide an ultrasonic transducer, an ultrasonic device, a liquid jet head, a liquid jet apparatus, and a manufacturing method of the piezoelectric element module.SOLUTION: A piezoelectric element module includes a first piezoelectric element 301 having a first piezoelectric layer 371 and a second piezoelectric element 302 having a second piezoelectric layer 372 different from the first piezoelectric layer 371 on the same substrate 310. The constant d of the first piezoelectric layer 371 is larger than the constant d of the second piezoelectric layer 372. |
申请公布号 |
JP2014194993(A) |
申请公布日期 |
2014.10.09 |
申请号 |
JP20130070722 |
申请日期 |
2013.03.28 |
申请人 |
SEIKO EPSON CORP |
发明人 |
FURUBAYASHI TOMOKAZU;NISHIWAKI MANABU |
分类号 |
H01L41/09;B41J2/045;B41J2/055;H01L41/047;H01L41/113;H01L41/187;H01L41/31;H01L41/317;H01L41/319;H04R17/00 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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