| 摘要 |
<p>PROBLEM TO BE SOLVED: To allow single uniform and efficient processing by increasing flow rate of a processed object, relating to a microwave device which uses a cavity resonator of a single mode.SOLUTION: A microwave device is configured by containing a cavity resonator 10' consisting of a cylinder-like cavity radiation chamber 12' and an iris 11' having a square opening which is provided, by one point, on a side surface wall forming a side surface of the radiation chamber, with a major axis extending parallel to a center axis C' connecting centers of both bottom surfaces of the radiation chamber 12' together. The cavity resonator 10' is a cavity resonator of a TM010 mode in which a microwave is introduced into the radiation chamber 12' from the iris 11'. In the radiation chamber 12', a communication passage 60 in which a processed object is made to flow is provided in spiral which extends by winding around the center axis C'.</p> |
