| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a quartz resonator, in which process control of an etching process is easy and the quartz resonator can be accurately manufactured.SOLUTION: This method of manufacturing the quartz resonator is to form the plurality of quartz resonators on a crystal wafer by a wet etching method. The quartz resonator includes at least one recessed part, and a dimension measuring part is provided on the crystal wafer together with the plurality of quartz resonators. The method includes an external shape etching process for forming the external shape of the quartz resonator, and a recessed part etching process for forming the recessed part in the quartz resonator. In this method, an etching rate is calculated from the dimension change amount of the corrosion resistance film of the dimension measuring part in the recessed part etching process to determine a recessed part etching time. |
