发明名称 RESONATING ELEMENT, RESONATOR, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, MOVING VEHICLE AND METHOD OF MANUFACTURING RESONATING ELEMENT
摘要 A piezoelectric resonating element includes a piezoelectric substrate having a rectangular vibrating portion and a thick-walled portion, excitation electrodes and, and lead electrodes. The thick-walled portion includes a fourth thick-walled portion, a third thick-walled portion, a first thick-walled portion, and a second thick-walled portion. The third thick-walled portion includes a third slope portion and a third thick-walled body, and at least one slit is formed in the third thick-walled portion.
申请公布号 US2014300252(A1) 申请公布日期 2014.10.09
申请号 US201414312060 申请日期 2014.06.23
申请人 Seiko Epson Corporation 发明人 ISHII Osamu;MURAKAMI Shiro
分类号 H01L41/047;H01L41/08 主分类号 H01L41/047
代理机构 代理人
主权项 1. A resonating element comprising: a substrate, the substrate including: a vibrating portion that performs thickness-shear vibration, that has first and second main surfaces opposite to each other, the vibrating portion having first and second edges which are perpendicular to a vibration direction of the thickness-shear vibration, the vibrating portion having third and fourth edges which are parallel to the thickness-shear vibration, and the vibrating portion having a first thickness;a first thick-walled portion that is located along the first edge of the vibrating portion so as to be connected to the vibrating portion, a thickness of the first thick-walled portion being thicker than the first thickness;a second thick-walled portion that is located along the second edge of the vibrating portion so as to be connected to the vibrating portion, a thickness of the second thick-walled portion being thicker than the first thickness; anda third thick-walled portion that is located along the third edge of the vibrating portion so as to be connected to the vibrating portion and the first and second thick-walled portions, a thickness of the third thick-walled portion being thicker than the first thickness; a first excitation electrode that is formed on the first main surface of the vibrating portion; and a second excitation electrode that is formed on the second main surface of the vibrating portion so as to overlap with the first excitation electrode via the vibrating portion in a plan view, wherein the third thick-walled portion has first and second main surfaces opposite to each other, the first main surface of the vibrating portion being connected to the first main surface of the third thick-walled portion via a first slope, and the second main surface of the vibrating portion being connected to the second main surface of the third thick-walled portion via a second slope, the first thick-walled portion having first and second main surfaces opposite to each other, the first main surface of the vibrating portion being connected to the first main surface of the first thick-walled portion via a third slope, and the second main surface of the vibrating portion and the second main surface of the first thick-walled portion are connected to each other so as to form a first even surface, and the second thick-walled portion having first and second main surfaces opposite to each other, the second main surface of the vibrating portion being connected to the second main surface of the second thick-walled portion via a fourth slope, and the first main surface of the vibrating portion and the first main surface of the second thick-walled portion are connected to each other so as to form a second even surface.
地址 Tokyo JP
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