| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser device which can suppress instability of discharge caused by discharge conditions differing every split electrode that has split a discharge electrode in a lengthwise direction.SOLUTION: A chamber is filled up with laser gases. A pair of discharge electrodes are placed in the chamber. The pair of discharge electrodes face each other with a discharge space long in a first direction in between and include a plurality of conductive members placed separately in the first direction. A plurality of terminals led from an inside of the chamber to an outside are attached onto a wall surface of the chamber. In-chamber current paths connect the conductive members to the terminals. Out-chamber current paths connect the terminals to an AC current source. In each of the out-chamber current paths, an inductance component is inserted.</p> |
