发明名称 EFUSE DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 The present invention relates to an e-fuse device comprising an anode, a cathode, and a fuse portion for connecting the anode and the cathode. The e-fuse device includes an insulating film formed on the fuse portion. The fuse portion includes a first region, and a second region having a higher melting point than the first region. The insulating film includes: a compressive stress insulating film formed on a part of the first region; and a tensile stress insulating film formed on the region other than the region in which the compressive stress insulating film is formed.
申请公布号 KR20140117907(A) 申请公布日期 2014.10.08
申请号 KR20130032835 申请日期 2013.03.27
申请人 INTELLECTUAL DISCOVERY CO., LTD. 发明人 KIM, DEOK KEE
分类号 H01L23/62;H01L21/82 主分类号 H01L23/62
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