摘要 |
The present invention relates to an e-fuse device comprising an anode, a cathode, and a fuse portion for connecting the anode and the cathode. The e-fuse device includes an insulating film formed on the fuse portion. The fuse portion includes a first region, and a second region having a higher melting point than the first region. The insulating film includes: a compressive stress insulating film formed on a part of the first region; and a tensile stress insulating film formed on the region other than the region in which the compressive stress insulating film is formed. |