POLISHING LIQUID COMPOSITION FOR SILICON WAFERS

摘要

A polishing composition for a silicon wafer, includes a macromolecular compound, an abrasive, and an aqueous medium. The macromolecular compound includes a constitutional unlit (a1) represented by the following general formula (1), a constitutional unit (a2) represented by the following general formula (2), and a constitutional unit (a3) represented by the following general formula (3). The total of the constitutional unit (a3) is 0.001 to 1.5 mol% of all the constitutional units of the macromolecular compound.