发明名称 |
GROOVE PROCESSING TOOL AND GROOVE PROCESSING APPARATUS USING THE SAME |
摘要 |
<p>The present invention is to extend a service life of a groove processing tool. The groove processing tool (2) comprises a support portion (21) and a processing unit (22). The support portion (21) is a part supported in a holder (41). The processing unit (22) is formed at the front end of the support portion (21) and has an edge (222) for processing the groove. When the groove processing tool (2) forms the groove, a cross-sectional shape of the edge (222) in the plane parallel to a main surface (W1) is constant along the vertical direction of the main surface (W1).</p> |
申请公布号 |
KR20140118846(A) |
申请公布日期 |
2014.10.08 |
申请号 |
KR20140035059 |
申请日期 |
2014.03.26 |
申请人 |
MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. |
发明人 |
TOMINAGA KEISUKE |
分类号 |
H01L21/76;H01L31/04 |
主分类号 |
H01L21/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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