发明名称 |
MEMS SCANNING MICROMIRROR |
摘要 |
A MEMS-micro-mirror (30) is provided comprising a mirror body (50) that is rotatably arranged in a mirror frame (60) around a rotation axis (58) extending in a plane defined by the mirror body. The rotation axis extends through a first and a second mutually opposite end-portion (51, 53) of the mirror body. The mirror has a reflective first main surface (55) and opposite said first main surface a second main surface (57) provided with a first and a second pair of reinforcement beams. The pair of reinforcement beams (91a, 91b) extends from the first end-portion (51) in mutually opposite directions away from the rotation axis. The second pair of reinforcement beams (93a, 93b) extends from the second end-portion (53) in mutually opposite directions away from the rotation axis. Reinforcement beams of said first pair extend towards respective ones of said second pair. |
申请公布号 |
EP2786193(A2) |
申请公布日期 |
2014.10.08 |
申请号 |
EP20120798014 |
申请日期 |
2012.11.28 |
申请人 |
INNOLUCE B.V. |
发明人 |
VAN LIEROP, HENDRIKUS WILHELMUS LEONARDUS ANTONIUS;SUIJLEN, MATTHIJS ALEXANDER GERARD |
分类号 |
G02B26/08;B81B3/00;B81B7/00 |
主分类号 |
G02B26/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|