| 摘要 |
The purpose of the present invention is to provide a vibrating element exhibiting a high vibration feature with low power consumption, a vibrator including the same, an oscillator, an electronic apparatus, a sensor, and a moving object. The vibrating element (2) includes a crystalline substrate (3) which includes a base part (4), a pair of vibrating arms (5, 6) which are extended from the base part (4), and a support arm (71) which is located between the vibrating arms (5, 6) and extended from the base part (4) on the same side as the vibrating arms. Also, the vibrating arm (5) includes an arm part (51) and a hammer head (59) which is formed on the front end of the arm part (51). The arm part (51) includes a pair of main surfaces and a groove with a bottom which is opened to the main surfaces. According to the present invention, the width of each of bank-shaped parts which are disposed side by side by interposing the groove along the width direction which is orthogonal to the longitudinal direction of the vibrating arm on the main surface is 6 um or less. |
