| 摘要 |
A system, a method, and a computer program are presented in order to control the temperature of a window in a semiconductor manufacturing chamber. An apparatus includes an air amplifier, a plenum, a heater, a temperature sensor, and a controller. The air amplifier is coupled with pressurized gas and generates air flow when activated. The air amplifier is also coupled with the plenum and the heater. The plenum receives air flow and distributes air flow on the window of a plasma chamber. When the heater is activated, the air flow is heated while pressing, and when the heater is not activated, the air flow cools down the window. The temperature sensor is placed near the window of the plasma chamber, and the controller is defined to activate the air amplifier and the heater based on the temperature measured by the temperature sensor. |
