| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method for improving sensitivity without damaging a sample because surface temperature rises to increase a risk to damage the sample regardless of making illumination shorter in wavelength, performing a high output, reducing an illumination range, or the like to improve sensitivity in the conventional practice. SOLUTION: An illumination optical system for performing linear illumination and a detection optical system for dividing an area to be illuminated by a line sensor for detection illuminate the same defect a plurality of times through one inspection, and detection sensitivity is improved by adding scattered lights thereof. This method can suppress an increase in temperature on a sample surface and also enables the sample surface to be inspected without deteriorating throughput. COPYRIGHT: (C)2012,JPO&INPIT |
