ETCHANT COMPOSITION FOR COPPER-CONTAINING METAL LAYER AND PREPARING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY USING SAME

摘要

The present invention relates to an etching solution composition for a cooper-based metal film, and a method to manufacture an array substrate for a liquid crystal display device using the same. According to the present invention, the etching solution composition includes: a water-soluble compound having a nitrogen atom and a carboxyl group in one molecule, an azole compound, a compound containing fluoride, a sulfate compound, citric acid, and water. Therefore, the etching solution composition has significantly enhanced stability and can form a micropattern.