| 摘要 |
The present invention is to provide a vacuum pump which has abatement function which can use the heat of exhaust gas, heated by the compression of the vacuum pump, for detoxification of the exhaust gas, and can use the heat generated out of detoxification process in a pretreatment unit for heating the inert gas to be supplied to the vacuum pump. The pretreatment unit is attached to an exhaust port of the vacuum pump (1) to detoxify the exhaust gas discharged from the vacuum pump (1). A heat exchanger (26) for heating the inert gas by using the heat, generated when detoxifying the exhaust gas in the pretreatment unit (10), is installed. The inert gas heated by the heat exchanger (26) is introduced to the vacuum pump (1). |
