INSPECTION SYSTEM USING SCANNING ELECTRON MICROSCOPE

摘要

The present invention relates to an inspection system using a scanning electron microscope, which comprises: an automatic optical inspecting device which inspects a defect of an object to be inspected, using light; a scanning electron microscope chamber which inspects the cause of the defect of the object using electron beams, and maintains a vacuum state; a stage which is positioned in the lower part by being separated from the scanning electron microscope chamber, and loads the object; and a transferring device which is connected with the scanning electron microscope chamber and the automatic optical inspecting device, and transfers the scanning electron microscope chamber and the automatic optical inspecting device on the stage. In addition, an atmospheric state can be maintained between the scanning electron microscope chamber and the object. Therefore, the inspection system can save costs and improve production yield by inspecting a large object, for analysis, without destroying the large object.