| 摘要 |
PURPOSE: A multistage impacter for lower flow, and a manufacturing method thereof are provided to form a nozzle with a micro channel having a cross section of micro or nana unit by using a lithography process. CONSTITUTION: A manufacturing method of a multistage impacter for lower flow comprises the steps of: coating photosensitive polymer on a substrate (S10); soft-baking to the coated photosensitive polymer (S20); exposing by using a mask having a pattern about multiple flow spaces and nozzles, and an inlet and outlet (S30); removing the photosensitive polymer corresponding to the inlet, outlet, nozzles, and flow spaces (S40); forming a side wall part by hard-baking to the remaining photosensitive polymer (S50); combining the side wall part with the substrate integrally by covering a cover plate on the side wall part(S60). [Reference numerals] (S10) Coating photosensitive polymer; (S20) Soft baking; (S30) Exposure to light; (S40) Development; (S50) Hard baking; (S60) Coupling a cover plate |
