SUBSTRATE TREATING APPARATUS

摘要

The present invention relates to a substrate processing apparatus. The substrate processing apparatus, according to an embodiment of the present invention, comprises: a housing; a plurality of opening/closing members for providing a driving force to open/close the housing; a fluid storage member for supplying a fluid to the opening/closing member; and a fluid dispensing unit which is connected to the fluid storage member through a supply line and dispenses the fluid supplied from the fluid storage member to each of the opening/closing members. The fluid dispensing unit includes: dispensing lines connected to each of the opening/closing members by being branched out from the supply line; and a fluid dispensing member located at the position where the dispensing lines are branched out from the supply line.