| 摘要 |
A differential pressure sensor comprises a housing having a high side input port 102 that allows a high pressure media to enter a high side of the housing and a low side input port 104 that allows a low pressure media to enter a low side of the housing when the housing is placed in an environment. A substrate 126 is mounted within the housing and a stress isolation pedestal 114 is mounted on the substrate. A die stack 110, 112, having a sensor and sensing circuitry, is bonded to the stress isolation member. A low side atomic layer deposition (ALD) is applied to surfaces of the substrate, the stress isolation member, and the die stack to protect the sensor surfaces from corrosive environments. A post 220 (see figure 2) transfers the deflection of the high pressure sensing membrane to the low pressure sensing membrane. One of the ports may be vacuum sealed to form an absolute pressure sensor. |
