发明名称 |
APPARATUS FOR MANUFACTURING SILICON SUBSTRATE |
摘要 |
Disclosed is an apparatus for manufacturing a silicon substrate. The apparatus for manufacturing a silicon substrate according to an embodiment includes: a crucible unit storing silicon molten metal; a cast unit enlarged from a discharge unit of the crucible unit and having a cast space in which the silicon substrate is formed; and a dummy bar inserted from one side of the cast unit to the cast space and having a groove dented toward the inside on one side contacting the silicon molten metal, wherein the groove has a larger inner width than an entrance. |
申请公布号 |
KR20140118598(A) |
申请公布日期 |
2014.10.08 |
申请号 |
KR20130034801 |
申请日期 |
2013.03.29 |
申请人 |
KOREA INSTITUTE OF ENERGY RESEARCH |
发明人 |
LEE, JIN SEOK;JANG, BO YUN;KIM, JOON SOO;AHN, YOUNG SOO |
分类号 |
C30B28/10;C30B11/00;C30B29/06 |
主分类号 |
C30B28/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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