MANUFACTURING METHOD OF SUBSTRATE FOR LIGHT EMITTING DEVICE AND LIGHT EMITTING DEVICE

摘要

The present invention relates to a method for forming a heterogeneous material unevenness made of heterogeneous materials on a substrate for a semiconductor light emitting device, which includes the steps of: growing a first unevenness (221) of an island shape by depositing an etching mask material on a substrate (210); and forming a heterogeneous material unevenness (220) composed of the first unevenness formed of the etching mask material and a second unevenness by forming the second unevenness (222) by etching the substrate using the first unevenness as an etching mask.