发明名称 |
Method of fabricating a thin-film transistor |
摘要 |
There is provided a method of manufacturing a thin-film device, the method including forming a first substrate on a supporting base by a coating method, the first substrate being formed by using a resin material; forming a second substrate on the first substrate by using any one of a thermosetting resin and energy ray-curable resin; forming an active element on the second substrate; and removing the supporting base from the first substrate. The resin material used to form the first substrate has a glass transition temperature of at least 180° C. |
申请公布号 |
US8853014(B2) |
申请公布日期 |
2014.10.07 |
申请号 |
US201213414842 |
申请日期 |
2012.03.08 |
申请人 |
Sony Corporation |
发明人 |
Fukuda Toshio;Ishii Yui |
分类号 |
H01L21/00;H01L29/76;H01L51/00;H01L51/05;H01L27/32;G02F1/1368;G02F1/167 |
主分类号 |
H01L21/00 |
代理机构 |
Sheridan Ross P.C. |
代理人 |
Sheridan Ross P.C. |
主权项 |
1. A method of manufacturing a thin-film device, the method comprising:
forming a first substrate on a supporting base by a coating method, the first substrate being formed by using a resin material; forming a second substrate on the first substrate by using any one of a thermosetting resin and energy ray-curable resin; forming an active element on the second substrate; and removing the supporting base from the first substrate, wherein the resin material used to form the first substrate has a glass transition temperature of at least 180° C. |
地址 |
JP |