发明名称 Method of fabricating a thin-film transistor
摘要 There is provided a method of manufacturing a thin-film device, the method including forming a first substrate on a supporting base by a coating method, the first substrate being formed by using a resin material; forming a second substrate on the first substrate by using any one of a thermosetting resin and energy ray-curable resin; forming an active element on the second substrate; and removing the supporting base from the first substrate. The resin material used to form the first substrate has a glass transition temperature of at least 180° C.
申请公布号 US8853014(B2) 申请公布日期 2014.10.07
申请号 US201213414842 申请日期 2012.03.08
申请人 Sony Corporation 发明人 Fukuda Toshio;Ishii Yui
分类号 H01L21/00;H01L29/76;H01L51/00;H01L51/05;H01L27/32;G02F1/1368;G02F1/167 主分类号 H01L21/00
代理机构 Sheridan Ross P.C. 代理人 Sheridan Ross P.C.
主权项 1. A method of manufacturing a thin-film device, the method comprising: forming a first substrate on a supporting base by a coating method, the first substrate being formed by using a resin material; forming a second substrate on the first substrate by using any one of a thermosetting resin and energy ray-curable resin; forming an active element on the second substrate; and removing the supporting base from the first substrate, wherein the resin material used to form the first substrate has a glass transition temperature of at least 180° C.
地址 JP
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