Capacitor designs for integrated circuits utilizing self-aligned double patterning (SADP)

摘要

Methodologies enabling BEoL VNCAPs in ICs and resulting devices are disclosed. Embodiments include: providing a plurality of mandrel recesses extending horizontally on a substrate, each of the mandrel recesses having an identical width and being separated from another one of the mandrel recesses by an identical distance; providing a plurality of routes, each of the plurality of routes being positioned in a different one of the mandrel recesses; and providing first and second vertical segments on the substrate, the first vertical segment being connected to a set of the plurality of routes and separated from the second vertical segment, and the second vertical segment being separated from the set of routes.

主权项

1. A computer-implemented method comprising:
providing a plurality of mandrel recesses extending horizontally on a substrate, each of the mandrel recesses having an identical width and being separated from another one of the mandrel recesses by an identical distance; providing a plurality of first routes, each of the plurality of first routes being positioned in a different one of the mandrel recesses; and providing a first vertical segment and a second vertical segment on the substrate, the first vertical segment being connected to a first set of the plurality of first routes and separated from the second vertical segment, and the second vertical segment being separated from the first set of the plurality of first routes.