| 发明名称 | Thermal detector, thermal detector device, electronic instrument, and method of manufacturing thermal detector | ||
| 摘要 | The thermal detector includes a substrate, a thermal detector element including a light absorbing film, a support member supporting the thermal detector element and supported on the substrate so that a cavity is present between the member and the substrate, and at least one auxiliary support post of convex shape protruding from either the substrate or the support member towards the other. The height of the at least one auxiliary support post is shorter than the maximum height from the substrate to the support member. | ||
| 申请公布号 | US8851748(B2) | 申请公布日期 | 2014.10.07 |
| 申请号 | US201113013040 | 申请日期 | 2011.01.25 |
| 申请人 | Seiko Epson Corporation | 发明人 | Noda Takafumi |
| 分类号 | G01J5/02;G01J5/10;G01J5/34 | 主分类号 | G01J5/02 |
| 代理机构 | Global IP Counselors, LLP | 代理人 | Global IP Counselors, LLP |
| 主权项 | 1. A thermal detector comprising: a substrate; a thermal detector element including a light absorbing film; a support member supporting the thermal detector element, the support member supported on the substrate so that a cavity is defined by opposing surfaces of the support member and the substrate; and at least one auxiliary support post protruding from either the substrate or the support member towards the other, a gap being disposed adjacent to the at least one auxiliary support post in a region between the opposing surfaces of the support member and the substrate with a sum of a height of the at least one auxiliary support post and a height of the gap being substantially equal to or less than a maximum height between the opposing surfaces of the substrate and the support member, the gap being disposed in a position overlapping the at least one auxiliary support post as viewed along a direction normal to the substrate. | ||
| 地址 | Tokyo JP | ||