| 摘要 |
A MEMS fluid control system is provided having a micro-electro-mechanical system. The system includes a plurality of ports, a cavity, a valve, an actuator, and a pair of electrical contacts. The plurality of ports are in communication with the cavity, the valve is disposed in the cavity, and the valve is connected to the actuator. The system further includes a hydraulic circuit having a pressure supply line in communication with a first of the plurality of ports, a control line in communication with a second of the plurality of ports, and an exhaust line in communication with a third of the plurality of ports. The valve includes an elongated portion and a blocking portion, the blocking portion includes a first, a second, and a third portions. |
| 主权项 |
1. A micro-electro-mechanical fluid control device, the device comprising:
a first, a second, and an intermediate plate, wherein the intermediate plate is disposed between the first and second plates, the first plate includes a pair of electrical contact cavities, the second plate includes a first, a second and a third ports, and the intermediate plate includes a valve, a valve cavity, and an actuator; and wherein the first, second, and third ports are in communication with the valve cavity, the valve is disposed in the cavity, and the valve is connected to the actuator; wherein the valve includes an elongated portion and a blocking portion and the blocking portion includes a first, a second, and a third portions, and wherein the first portion of the blocking portion includes a first and a second convex surface and a first planar surface, the first convex surface is opposite the second convex surface and the first and second convex surfaces are connected by the first planar surface. |
