发明名称 A composition for oxide thin film, preparation method of the composition, methods for forming the oxide thin film using the composition, and an electrical device using the composition
摘要 Provided are a composition for an oxide semiconductor, a method of preparing the composition, methods of forming an oxide semiconductor thin film and an electronic device using the composition. The composition for an oxide semiconductor includes a tin compound, a zinc compound, and a low electronegativity metal compound containing a metal with an electronegativity lower than zinc.
申请公布号 KR101447638(B1) 申请公布日期 2014.10.07
申请号 KR20100083136 申请日期 2010.08.26
申请人 发明人
分类号 H01L21/368 主分类号 H01L21/368
代理机构 代理人
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