主权项 |
1. A fluid handling apparatus comprising:
a substrate; an intermediate film having a hole, said intermediate film being joined to one surface of the substrate; a lower film arranged over the intermediate film; a transfer function layer for transferring electricity or heat, the transfer function layer being formed on the lower film so as to cover a part of a surface of the lower film on a side of the intermediate film; and a bonding layer arranged between the intermediate film and the lower film and between the intermediate film and the transfer function layer for bonding the intermediate film and the lower film, and the intermediate film and the transfer function layer together, wherein said substrate includes a through hole or a concave constituting a first region formed at a portion corresponding to one end of the transfer function layer, said through hole or said concave includes an opening on a side of the lower film for communicating with the hole of the intermediate film, said opening being closed by the lower film, said transfer function layer includes a second region formed at a portion corresponding to the other end thereof for communicating with an outside, said transfer function layer is arranged to electrically or thermally connect the first region and the second region, and said transfer function layer is arranged between the bonding layer and the lower film in a state that the transfer function layer is in contact with the bonding layer without any gap. |