Physical quantity detector

摘要

A physical quantity detector includes a diaphragm including a displacement part that is displaced under external pressure, a ring-shaped fixing part that holds an outer circumferential part of the diaphragm, a holding member having a projection part that projects from an inner circumference of the fixing part toward a center at one surface side of the diaphragm, a support fixed to the projection part, and a pressure-sensitive device having a first base part fixed to the displacement part, a second base part fixed to the support, and a pressure-sensitive part provided between the base parts.

主权项

1. A physical quantity detector comprising:
a pressure receiving unit including a displacement part that is displaced under pressure and an outer circumferential part provided on an outer circumference of the displacement part; a holding member including a fixing part in an circumferential shape in a plan view, and a projection part that projects from an inner circumference of the fixing part toward a center in the plan view; the projection part having an opening and provided on one surface side of the pressure receiving unit, and the fixing part holding the outer circumferential part so that at least one part of the displacement part at the one surface side of the pressure receiving unit may be located within the opening in the plan view from the projection part side, a support fixed to the projection part; and a pressure-sensitive device including a first base part fixed to the at least one part of the displacement part, a second base part fixed to the support, and a pressure-sensitive part provided between the first base part and the second base part, the first base part and the second base part stood in line in a direction in which the displacement part is displaced.