Substrate transferring apparatus

摘要

Disclosed is a substrate transfer device transferring a substrate and loading the substrate into a cargo box. The substrate transfer device may include a clamping unit fixing a substrate and adjusting an angle of the fixed substrate; and a transfer control unit connected to the clamping unit and moving or rotating the clamping unit. The clamping unit may include a frame; an absorption unit coupled to the frame and absorbing the substrate at one surface of the substrate without contacting the substrate; a grip unit coupled to the frame and fixing the substrate together with the absorption unit by exerting external force toward the absorption unit; and an operation control unit coupled to the frame, controlling the grip unit to exert the external force toward the absorption unit, and controlling the angles at which the absorption unit and the grip unit are coupled to the frame.