APPARATUS FOR SUPPLYING EVAPORATION MATERIAL AND APPARATUS FOR DEPOSITION HAVING THE SAME

摘要

Disclosed are an apparatus for supplying an evaporation material and a deposition apparatus including the same. The apparatus for supplying the evaporation material includes a supply box which includes an outlet on the lower end of one sidewall and a hollow part in which the evaporation material is filled, a mixing screw which is formed on the hollow part and mixes the evaporation material by rotation, and a rotating screw bar which is installed on the lower end of the hollow part to arrange one end thereof to be vertical to the sidewall by facing the outlet and outputs the evaporation material to the outlet by the rotation. The apparatus for supplying the evaporation material maintains the vacuum atmosphere of a vacuum chamber and continuously fills an evaporation source with the evaporation materials.