Laser crystallization apparatus and laser crystallization method using the apparatus

摘要

A laser crystallization device includes a first light source providing a first light and a second light source providing a second light. The device further includes a first lens set receiving the first light to generate a first transmitted light, the first transmitted light having a first profile, the first profile having a first profile error portion and a first non-error portion. The device further includes a second lens set receiving the second light to generate a second transmitted light, the second transmitted light having a second profile, the second profile having a second profile error portion and a second non-error portion, the second profile error portion corresponding to the first non-error portion, the second non-error portion corresponding to the first profile error portion. The device further includes an optical system combining the first transmitted light with the second transmitted light.

主权项

1. A laser crystallization device comprising:
a first light source unit configured to provide a first light; a second light source unit configured to provide a second light; a first lens set configured to receive the first light to generate a first transmitted light, the first transmitted light having a first profile, the first profile having a first profile error portion and a first non-error portion; a second lens set configured to receive the second light to generate a second transmitted light, the second transmitted light having a second profile, the second profile having a second profile error portion and a second non-error portion; and an optical system configured to combine the first transmitted light with the second transmitted light with the second profile error portion being combined with the first non-error portion and with the second non-error portion being combined with the first profile error portion, wherein a position of the first profile error portion corresponds to a position of the second non-error portion, a position of the second error portion corresponds to a position of the first profile non-error portion.