发明名称 CONTROL SYSTEM OF TRANSFER APPARATUS AND ADJUSTING METHOD OF ACCESS POSITION OF TRANSFER APPARATUS
摘要 The present invention relates to a control system of a transfer apparatus that can adjust a position in a short time, and an adjusting method of an access position of the transfer apparatus. The control system includes first to sixth transfer arms (X1 to X6), process modules (B10, C11), a group determining unit (J10), and an execution instructing unit (J12). The process modules (B10, C11) are accessed from the first to sixth transfer arms (X1 to X6). The process modules (B10, C11) have a process module accessed from the transfer arms. The group determining unit (J10) divides the transfer arms to one of the same group which does not access to the same process module when the transfer arm accesses to the process module. The execution instructing unit (J12) instructs the execution of adjusting the access position for every group determined by the group determining unit (J10), when the transfer arm accesses to the process module.
申请公布号 KR20140117294(A) 申请公布日期 2014.10.07
申请号 KR20140034580 申请日期 2014.03.25
申请人 TOKYO ELECTRON LIMITED 发明人 TOMOYASU YOSHINOBU;OHTANI YOSUKE;SUZUKI ATSUSHI;HAYASHI TOKUTAROU;KURATOMI KAZUNORI
分类号 H01L21/68;H01L21/677 主分类号 H01L21/68
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