METHOD FOR MANUFACTURING FLEXIBLE BIO SENSOR USING SOLUTION PROCESS

摘要

The present invention relates to a method for manufacturing a flexible biosensor using a solution process. The method for manufacturing a biosensor according to an embodiment of the present invention comprises the steps of forming a gate and an insulation layer on a substrate; coating a metal compound solution on an insulation layer; forming a metal oxide thin film from the metal compound solution by thermally treating the substrate at 280-300°C; and forming a source and a drain on the metal oxide thin film, wherein the metal compound oxide solution includes 0.3-0.6 g of an acid material for 10 ml of the solution.